MICRO-ACTUATOR, MICRO-ACTUATOR DEVICE, OPTICAL SWITCH AND OPTICAL SWITCH ARRAY

Details for Australian Patent Application No. 2002332295 (hide)

Owner NIKON CORPORATION

Inventors SUZUKI, Junji; ISHIZUYA, Tohru; SUZUKI, Yoshihiko; AKAGAWA, Keiichi

Pub. Number AU-A-2002332295

PCT Number PCT/JP02/09023

PCT Pub. Number WO2003/024864

Priority 2001-282421 17.09.01 JP; 2001-368060 03.12.01 JP

Filing date 5 September 2002

Wipo publication date 1 April 2003

International Classifications

B81B 003/00 Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes

G02B 026/08 Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating - for controlling the direction of light

B81C 001/00 Manufacture or treatment of devices or systems in or on a substrate

Event Publications

6 February 2003 Complete Application Filed

  Priority application(s): 2001-282421 17.09.01 JP; 2001-368060 03.12.01 JP

5 June 2003 Application Open to Public Inspection

  Published as AU-A-2002332295

17 June 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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