OPTICAL SYSTEM ANHD EXPOSURE SYSTEM PROVIDED WITH THE OPTICAL SYSTEM, AND PRODUCTION METHOD FOR DEVICE

Details for Australian Patent Application No. 2002332251 (hide)

Owner NIKON CORPORATION

Inventors NISHIKAWA, Jin

Pub. Number AU-A-2002332251

PCT Number PCT/JP02/08543

PCT Pub. Number WO2003/023480

Priority 2001-271387 07.09.01 JP

Filing date 23 August 2002

Wipo publication date 24 March 2003

International Classifications

G02B 013/24 Optical objectives specially designed for the purposes specified below - for reproducing or copying at short object distances

G02B 013/14 Optical objectives specially designed for the purposes specified below - for use with infra-red or ultra-violet radiation

G02B 001/02 Optical elements characterised by the material of which they are made

H01L 021/027 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

G03F 007/20 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Exposure

Event Publications

6 February 2003 Complete Application Filed

  Priority application(s): 2001-271387 07.09.01 JP

19 June 2003 Application Open to Public Inspection

  Published as AU-A-2002332251

10 June 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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