METHOD AND APPARATUS FOR FORMING LOW PERMITTIVITY FILM AND ELECTRONIC DEVICE USING THE FILM

Details for Australian Patent Application No. 2002332163 (hide)

Owner KABUSHIKI KAISHA WATANABE SHOKO SUGINO, Takashi

Inventors SUGINO, Takashi; UMEDA, Masaru; KUSUHARA, Masaki

Pub. Number AU-A-2002332163

PCT Number PCT/JP02/09227

PCT Pub. Number WO2003/023842

Priority 2001-274345 10.09.01 JP

Filing date 10 September 2002

Wipo publication date 24 March 2003

International Classifications

H01L 021/318 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

C23C 016/56 Chemical deposition or plating by decomposition - After-treatment

C23C 016/38 Chemical deposition or plating by decomposition - Borides

H01L 021/314 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

6 February 2003 Complete Application Filed

  Priority application(s): 2001-274345 10.09.01 JP

19 June 2003 Application Open to Public Inspection

  Published as AU-A-2002332163

10 June 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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