WAFER SCRIBING METHOD AND WAFER SCRIBING DEVICE

Details for Australian Patent Application No. 2002332048 (hide)

Owner MOTOROLA, INC.

Inventors MARX, Eckhard; MAUTZ, Karl, E.; PEITER, Martin

Pub. Number AU-A-2002332048

PCT Number PCT/US02/31903

PCT Pub. Number WO2003/038895

Priority 10/016,633 30.10.01 US

Filing date 4 October 2002

Wipo publication date 12 May 2003

International Classifications

H01L 023/544 Details of semiconductor or other solid state devices - Marks applied to semiconductor devices, e.g. registration marks, test patterns

Event Publications

6 February 2003 Complete Application Filed

  Priority application(s): 10/016,633 30.10.01 US

10 July 2003 Application Open to Public Inspection

  Published as AU-A-2002332048

15 July 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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