SYSTEM FOR CUSHIONING WAFER IN WAFER CARRIER

Details for Australian Patent Application No. 2002332026 (hide)

Owner ENTEGRIS, INC.

Inventors ZABKA, Michael; NICOLAS, Matthew; MOLITOR, David

Pub. Number AU-A-2002332026

PCT Number PCT/US02/31617

PCT Pub. Number WO2003/029113

Priority 09/971,352 04.10.01 US

Filing date 3 October 2002

Wipo publication date 14 April 2003

Event Publications

6 February 2003 Complete Application Filed

  Priority application(s): 09/971,352 04.10.01 US

26 June 2003 Application Open to Public Inspection

  Published as AU-A-2002332026

17 June 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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