TEST STRUCTURES FOR ESTIMATING DISHING AND EROSION EFFECTS IN COPPER DAMASCENE TECHNOLOGY

Details for Australian Patent Application No. 2002331919 (hide)

Owner PDF SOLUTIONS, INC.

Inventors STINE, Brian, E.; WEILAND, Larg; CIPLICKAS, Dennis, J.; DECKER, Markus; HESS, Christopher

Pub. Number AU-A-2002331919

PCT Number PCT/US02/30904

PCT Pub. Number WO2003/027690

Priority 60/325,514 28.09.01 US

Filing date 27 September 2002

Wipo publication date 7 April 2003

International Classifications

G01R 031/02 Arrangements for testing electric properties - Testing of electric apparatus, lines, or components for short-circuits, discontinuities, leakage, or incorrect line connection

G01R 031/26 Arrangements for testing electric properties - Testing of individual semiconductor devices

Event Publications

6 February 2003 Complete Application Filed

  Priority application(s): 60/325,514 28.09.01 US

26 June 2003 Application Open to Public Inspection

  Published as AU-A-2002331919

17 June 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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