METHOD AND APPARATUS FOR IMPROVED ION BUNCHING IN AN ION IMPLANTATION SYSTEM

Details for Australian Patent Application No. 2002331715 (hide)

Owner AXCELIS TECHNOLOGIES, INC.

Inventors SAADATMAND, Kourosh; DIVERGILIO, William

Pub. Number AU-A-2002331715

PCT Number PCT/US02/26995

PCT Pub. Number WO2003/019613

Priority 60/314,392 23.08.01 US

Filing date 23 August 2002

Wipo publication date 10 March 2003

International Classifications

H01J 037/317 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof - for changing properties of the objects or for applying thin layers thereon, e.g. ion implantation

G21K 001/08 Arrangements for handling radiation or particles, e.g. focusing, moderating

H05H 007/18 Details of devices of the types covered by groups

Event Publications

6 February 2003 Complete Application Filed

  Priority application(s): 60/314,392 23.08.01 US

5 June 2003 Application Open to Public Inspection

  Published as AU-A-2002331715

6 May 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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