Microwave plasma source

Details for Australian Patent Application No. 2002331413 (hide)

Owner Varian Australia Pty Ltd

Inventors Hammer, Michael Ron

Agent Phillips Ormonde Fitzpatrick

Pub. Number AU-B-2002331413

PCT Number PCT/AU02/01142

PCT Pub. Number WO2003/069964

Priority PS 0442 11.02.02 AU

Filing date 23 August 2002

Wipo publication date 4 September 2003

Acceptance publication date 5 April 2007

International Classifications

H05H 1/30 (2006.01) Generating plasma

G01N 21/68 (2006.01) Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible, or ultra-violet light

G01N 21/73 (2006.01) Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible, or ultra-violet light

H01J 37/32 (2006.01) Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof - Gas-filled discharge tubes

H05H 1/24 (2006.01) Generating plasma - Generating plasma

Event Publications

6 February 2003 Complete Application Filed

  Priority application(s): PS 0442 11.02.02 AU

2 October 2003 Application Open to Public Inspection

  Published as AU-B-2002331413

5 April 2007 Application Accepted

  Published as AU-B-2002331413

2 August 2007 Standard Patent Sealed

12 May 2011 Alteration of Name

  The name of the patentee has been altered to Agilent Technologies Australia (M) Pty Ltd 2003

22 March 2012 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This patent ceased under section 143(a), or Expired. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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