STABLE ENERGY DETECTOR FOR EXTREME ULTRAVIOLET RADIATION DETECTION

Details for Australian Patent Application No. 2002331241 (hide)

Owner LAMBDA PHYSIK AG

Inventors SCHRIEVER, Guido

Pub. Number AU-A-2002331241

PCT Number PCT/EP02/09073

PCT Pub. Number WO2003/017005

Priority 60/312,277 13.08.01 US

Filing date 13 August 2002

Wipo publication date 3 March 2003

International Classifications

G03F 007/20 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Exposure

H01L 031/10 Semiconductor devices sensitive to infra-red radiation, light, electromagnetic radiation of shorter wavelength, or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation - characterised by at least one potential-jump barrier or surface barrier, e.g. phototransistors

G21K 001/06 Arrangements for handling radiation or particles, e.g. focusing, moderating

Event Publications

6 February 2003 Complete Application Filed

  Priority application(s): 60/312,277 13.08.01 US

29 May 2003 Application Open to Public Inspection

  Published as AU-A-2002331241

6 May 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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