GRAPHICS ENGINE FOR HIGH PRECISION LITHOGRAPHY

Details for Australian Patent Application No. 2002330823 (hide)

Owner MICRONIC LASER SYSTEMS AB

Inventors SANDSTROM, Torbjorn; OLSSON, Martin; ELMFORS, Per; GUSTAVSON, Stefan

Pub. Number AU-A-2002330823

PCT Number PCT/SE02/01609

PCT Pub. Number WO2003/023488

Priority 09/954,721 12.09.01 US

Filing date 9 September 2002

Wipo publication date 24 March 2003

International Classifications

G02B 026/08 Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating - for controlling the direction of light

G06T 003/00 Geometric image transformation in the plane of the image, e.g. from bit-mapped to bit-mapped creating a different image

G03F 007/20 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Exposure

Event Publications

6 February 2003 Complete Application Filed

  Priority application(s): 09/954,721 12.09.01 US

19 June 2003 Application Open to Public Inspection

  Published as AU-A-2002330823

17 June 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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