DIELECTRIC BARRIER DISCHARGER

Details for Australian Patent Application No. 2002330490 (hide)

Owner SHIN-ETSU ENGINEERING CO., LTD.

Inventors OHNODA, Tadatomo

Pub. Number AU-A-2002330490

PCT Number PCT/JP02/09081

PCT Pub. Number WO2003/026361

Priority 2001-279997 14.09.01 JP

Filing date 6 September 2002

Wipo publication date 1 April 2003

International Classifications

H05B 041/24 Circuit arrangements or apparatus for igniting or operating discharge lamps - in which the lamp is fed by high-frequency ac

H01L 021/304 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/027 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

B01J 019/12 Chemical, physical, or physico-chemical processes in general - employing electromagnetic waves

Event Publications

30 January 2003 Complete Application Filed

  Priority application(s): 2001-279997 14.09.01 JP

5 June 2003 Application Open to Public Inspection

  Published as AU-A-2002330490

10 June 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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