SILICON MONOXIDE VAPOR DEPOSITION MATERIAL AND METHOD FOR PREPARATION THEREOF

Details for Australian Patent Application No. 2002330408 (hide)

Owner SUMITOMO TITANIUM CORPORATION

Inventors NISHIOKA, Kazuo

Pub. Number AU-A-2002330408

PCT Number PCT/JP02/09472

PCT Pub. Number WO2003/025246

Priority 2001-281524 17.09.01 JP

Filing date 13 September 2002

Wipo publication date 1 April 2003

International Classifications

C23C 014/24 Coating by vacuum evaporation, by sputtering or by ion implantation - Vacuum evaporation

C01B 033/113 Silicon

Event Publications

30 January 2003 Complete Application Filed

  Priority application(s): 2001-281524 17.09.01 JP

5 June 2003 Application Open to Public Inspection

  Published as AU-A-2002330408

10 June 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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