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Details for Australian Patent Application No. 2002329952 (hide)

Owner ASYST TECHNOLOGIES, INC.

Inventors BONORA, Anthony, C.; GOULD, Richard, H.; HINE, Roger, G.; KROLAK, Michael; SPEASL, Jerry

Pub. Number AU-A-2002329952

PCT Number PCT/US02/27909

PCT Pub. Number WO2003/021645

Priority 60/316,722 31.08.01 US; 10/087,400 01.03.02 US

Filing date 30 August 2002

Wipo publication date 18 March 2003

International Classifications

H01L 021/00 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

30 January 2003 Complete Application Filed

  Priority application(s): 60/316,722 31.08.01 US; 10/087,400 01.03.02 US

5 June 2003 Application Open to Public Inspection

  Published as AU-A-2002329952

10 June 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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