PROCESS FOR FORMING A FRAGILE LAYER INSIDE OF A SINGLE CRYSTALLINE SUBSTRATE

Details for Australian Patent Application No. 2002329945 (hide)

Owner USENKO, Alexander

Inventors USENKO, Alexander

Pub. Number AU-A-2002329945

PCT Number PCT/US02/27847

PCT Pub. Number WO2004/008514

Priority 10/195,045 12.07.02 US

Filing date 31 August 2002

Wipo publication date 2 February 2004

International Classifications

H01L 021/30 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/46 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

30 January 2003 Complete Application Filed

  Priority application(s): 10/195,045 12.07.02 US

18 March 2004 Application Open to Public Inspection

  Published as AU-A-2002329945

7 April 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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