ATMOSPHERIC PRESSURE WAFER PROCESSING REACTOR HAVING AN INTERNAL PRESSURE CONTROL SYSTEM AND METHOD

Details for Australian Patent Application No. 2002329885 (hide)

Event Publications

30 January 2003 Complete Application Filed

Priority application(s): 60/314,760 24.08.01 US

5 June 2003 Application Open to Public Inspection

Published as AU-A-2002329885

10 June 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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