APPARATUS AND METHOD FOR PLASMA PROCESSING

Details for Australian Patent Application No. 2002329753 (hide)

Owner TOKYO ELECTRON LIMITED

Inventors STRANG, Eric, J.

Pub. Number AU-A-2002329753

PCT Number PCT/US02/25955

PCT Pub. Number WO2003/021002

Priority 60/315,369 29.08.01 US

Filing date 29 August 2002

Wipo publication date 18 March 2003

International Classifications

C23C 016/00 Chemical deposition or plating by decomposition

C23F 001/00 Etching metallic material by chemical means

Event Publications

30 January 2003 Complete Application Filed

  Priority application(s): 60/315,369 29.08.01 US

5 June 2003 Application Open to Public Inspection

  Published as AU-A-2002329753

10 June 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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