BORON-DOPED TITANIUM NITRIDE LAYER FOR HIGH ASPECT RATIO SEMICONDUCTOR DEVICES

Details for Australian Patent Application No. 2002329660 (hide)

Owner MICRON TECHNOLOGY, INC.

Inventors DERRAA, Ammar; SHARAN, Sujit; CASTROVILLO, Paul

Pub. Number AU-A-2002329660

PCT Number PCT/US02/24088

PCT Pub. Number WO2003/012860

Priority 09/918,919 31.07.01 US

Filing date 30 July 2002

Wipo publication date 17 February 2003

International Classifications

H01L 021/768 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 023/532 Details of semiconductor or other solid state devices

Event Publications

30 January 2003 Complete Application Filed

  Priority application(s): 09/918,919 31.07.01 US

29 May 2003 Application Open to Public Inspection

  Published as AU-A-2002329660

6 May 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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