ANTIREFLECTIVE SILICONCONTAINING COMPOSITIONS AS HARDMASK LAYER

Details for Australian Patent Application No. 2002329596 (hide)

Owner INTERNATIONAL BUSINESS MACHINES CORPORATION

Inventors MOREAU, Wayne, M.; ANGELOPOULOS, Marie; ARIRAM, Ari; GUARNIERI, C., Richard; HUANG, WuSong; KWONG, Ranee

Pub. Number AU-A-2002329596

PCT Number PCT/US02/22176

PCT Pub. Number WO2004/007192

Filing date 11 July 2002

Wipo publication date 2 February 2004

International Classifications

B32B 009/04 Layered products characterised by particular substances used - comprising such substance as the main or only constituent of a layer, next to another layer of a specific substance

B05D 005/00 Processes for applying liquids or other fluent materials to surfaces to obtain special surface effects, finishes or structures

C08J 007/18 Chemical treatment or coating of shaped articles made of macromolecular substances

C08G 077/04 Macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing silicon, with or without sulfur, nitrogen, oxygen, or carbon

G03C 001/76 Photosensitive materials - Photosensitive materials characterised by the base or auxiliary layers

Event Publications

30 January 2003 Complete Application Filed

18 March 2004 Application Open to Public Inspection

  Published as AU-A-2002329596

7 April 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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