SYSTEM AND METHOD FOR DETECTING OCCLUSIONS IN A SEMICONDUCTOR MANUFACTURING DEVICE

Details for Australian Patent Application No. 2002329592 (hide)

Owner MITCHELL, Bradley, D.

Inventors MITCHELL, Bradley, D.

Pub. Number AU-A-2002329592

PCT Number PCT/US02/21981

PCT Pub. Number WO2003/006933

Priority 09/903,119 10.07.01 US

Filing date 10 July 2002

Wipo publication date 29 January 2003

International Classifications

G01F 001/68 Measuring volume flow - by using thermal effects

G01F 001/66 Measuring volume flow - by measuring frequency, phase shift, or propagation time of electromagnetic or other waves, e.g. ultrasonic flowmeters

G01N 007/02 Analysing materials by measuring the pressure or volume of a gas or vapour

Event Publications

30 January 2003 Complete Application Filed

  Priority application(s): 09/903,119 10.07.01 US

22 May 2003 Application Open to Public Inspection

  Published as AU-A-2002329592

8 April 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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