SUBSTRATE TREATING DEVICE AND SUBSTRATE TREATING METHOD

Details for Australian Patent Application No. 2002328513 (hide)

Owner TOKYO ELECTRON LIMITED

Inventors ORII, Takehiko; AMAI, Masaru

Pub. Number AU-A-2002328513

PCT Number PCT/JP02/08685

PCT Pub. Number WO2003/021657

Priority 2001-265648 03.09.01 JP

Filing date 28 August 2002

Wipo publication date 18 March 2003

International Classifications

H01L 021/316 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/304 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/306 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

23 January 2003 Complete Application Filed

  Priority application(s): 2001-265648 03.09.01 JP

5 June 2003 Application Open to Public Inspection

  Published as AU-A-2002328513

10 June 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

Legal

The information provided by the Site not in the nature of legal or other professional advice. The information provided by the Site is derived from third parties and may contain errors. You must make your own enquiries and seek independent advice from the relevant industry professionals before acting or relying on any information contained herein. Check the above data against the Australian Patent Office AUSPAT database.

Next and Previous Patents/Applications

2002328514-COMPOSITIONS INDUCING PLANT DISEASE-RESISTANCE AND PROCESS FOR PRODUCING THE SAME

2002328512-IMAGE DETECTION DEVICE