MICRO DEVICE AND ITS MANUFACTURING METHOD

Details for Australian Patent Application No. 2002328510 (hide)

Owner SUMITOMO HEAVY INDUSTRIES, LTD.

Inventors HIRATA, Toru; TSUKANE, Koichiro

Pub. Number AU-A-2002328510

PCT Number PCT/JP02/08682

PCT Pub. Number WO2003/020633

Priority 2001-261251 30.08.01 JP

Filing date 28 August 2002

Wipo publication date 18 March 2003

International Classifications

B81B 003/00 Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes

B81C 001/00 Manufacture or treatment of devices or systems in or on a substrate

G02B 026/08 Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating - for controlling the direction of light

Event Publications

23 January 2003 Complete Application Filed

  Priority application(s): 2001-261251 30.08.01 JP

5 June 2003 Application Open to Public Inspection

  Published as AU-A-2002328510

10 June 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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