ELECTROMAGNETIC FIELD SUPPLY DEVICE AND PLASMA PROCESSING DEVICE

Details for Australian Patent Application No. 2002328424 (hide)

Owner ANDO, Makoto TOKYO ELECTRON LIMITED YASAKA, Yasuyoshi

Inventors SHINOHARA, Kibatsu; ANDO, Makoto; YASAKA, Yasuyoshi; ISHII, Nobuo

Pub. Number AU-A-2002328424

PCT Number PCT/JP02/08978

PCT Pub. Number WO2003/030236

Priority 2001-297801 27.09.01 JP; 2001-300416 28.09.01 JP

Filing date 4 September 2002

Wipo publication date 14 April 2003

International Classifications

H05H 001/46 Generating plasma - using applied electromagnetic fields, e.g. high frequency or microwave energy

H01P 003/12 Waveguides

H01L 021/3065 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

23 January 2003 Complete Application Filed

  Priority application(s): 2001-297801 27.09.01 JP; 2001-300416 28.09.01 JP

26 June 2003 Application Open to Public Inspection

  Published as AU-A-2002328424

17 June 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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