PLASMA PROCESSOR AND PLASMA PROCESSING METHOD

Details for Australian Patent Application No. 2002328421 (hide)

Owner TOKYO ELECTRON LIMITED

Inventors KOBAYASHI, Yoshiyuki; NAGAKUBO, Keiichi

Pub. Number AU-A-2002328421

PCT Number PCT/JP02/08968

PCT Pub. Number WO2003/030235

Priority 2001-298256 27.09.01 JP

Filing date 4 September 2002

Wipo publication date 14 April 2003

International Classifications

H01L 021/3065 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

23 January 2003 Complete Application Filed

  Priority application(s): 2001-298256 27.09.01 JP

26 June 2003 Application Open to Public Inspection

  Published as AU-A-2002328421

10 June 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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