RETICLE PROTECTION AND TRANSPORT

Details for Australian Patent Application No. 2002327431 (hide)

Owner ASML US, INC.

Inventors FRIEDMAN, Glenn, M.; IVALDI, Jorge, S.; MCCLAY, James, A.; DEL PUERTO, Santiago, E.; DEMARCO, Michael, A.

Pub. Number AU-A-2002327431

PCT Number PCT/US02/25271

PCT Pub. Number WO2003/013993

Priority 09/925,722 10.08.01 US

Filing date 12 August 2002

Wipo publication date 24 February 2003

International Classifications

B65G 049/07 Conveying systems characterised by their application for specified purposes not otherwise provided for - for semiconductor wafers

H01L 021/68 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

23 January 2003 Complete Application Filed

  Priority application(s): 09/925,722 10.08.01 US

19 June 2003 Application Open to Public Inspection

  Published as AU-A-2002327431

6 May 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

Legal

The information provided by the Site not in the nature of legal or other professional advice. The information provided by the Site is derived from third parties and may contain errors. You must make your own enquiries and seek independent advice from the relevant industry professionals before acting or relying on any information contained herein. Check the above data against the Australian Patent Office AUSPAT database.

Next and Previous Patents/Applications

2002327432-METHOD AND SYSTEM FOR SELECTING AN OUTPUT OF A VCSEL ARRAY

2002327430-METHODS FOR TREATING DIABETES AND OTHER BLOOD SUGAR DISORDERS