PLATEN ASSEMBLY HAVING A TOPOGRAPHICALLY ALTERED PLATEN SURFACE

Details for Australian Patent Application No. 2002327411 (hide)

Owner LAM RESEARCH CORPORATION

Inventors TAYLOR, Travis, R.; XU, Cangshan; CROFTON, Kevin, T.; ZHAO, Eugene, Yuexing

Pub. Number AU-A-2002327411

PCT Number PCT/US02/24272

PCT Pub. Number WO2003/013788

Priority 09/925,254 08.08.01 US

Filing date 31 July 2002

Wipo publication date 24 February 2003

International Classifications

B24B 021/06 Machines or devices using grinding or polishing belts

B24B 037/04 Lapping machines or devices, i.e. requiring pulverulent abrading substances inserted between a lap of relatively soft but rigid material and the surface to be lapped - designed for working plane surfaces

Event Publications

23 January 2003 Complete Application Filed

  Priority application(s): 09/925,254 08.08.01 US

19 June 2003 Application Open to Public Inspection

  Published as AU-A-2002327411

6 May 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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