SLURRY DISTRIBUTOR FOR CHEMICAL MECHANICAL POLISHING APPARATUS AND METHOD OF USING THE SAME

Details for Australian Patent Application No. 2002326867 (hide)

Event Publications

23 January 2003 Complete Application Filed

Priority application(s): 60/323,117 10.09.01 US; Not Given 03.09.02 US

19 June 2003 Application Open to Public Inspection

Published as AU-A-2002326867

10 June 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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