SLURRY DISTRIBUTOR FOR CHEMICAL MECHANICAL POLISHING APPARATUS AND METHOD OF USING THE SAME

Details for Australian Patent Application No. 2002326867 (hide)

Owner MULTI PLANAR TECHNOLOGIES, INC.

Inventors SALDANA, Ernesto; WALSH, Cormac; REYES, Alejandro; KAJIWARA, Jiro; MOLONEY, Gerard; LIU, Jun; YANG, Junsheng

Pub. Number AU-A-2002326867

PCT Number PCT/US02/28787

PCT Pub. Number WO2003/022519

Priority 60/323,117 10.09.01 US; Not Given 03.09.02 US

Filing date 9 September 2002

Wipo publication date 24 March 2003

Event Publications

23 January 2003 Complete Application Filed

  Priority application(s): 60/323,117 10.09.01 US; Not Given 03.09.02 US

19 June 2003 Application Open to Public Inspection

  Published as AU-A-2002326867

10 June 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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