DIELECTRIC BARRIER DISCHARGE PROCESS FOR DEPOSITING SILICON NITRIDE FILM ON SUBSTRATES

Details for Australian Patent Application No. 2002326783 (hide)

Owner UNIVERSITY OF NEW HAMPSHIRE

Inventors MATTHEI, Keith; HARIHARAN, Alleppey; AMATO-WIERDA, Carmela; MOHAN, Chandra

Pub. Number AU-A-2002326783

PCT Number PCT/US02/27360

PCT Pub. Number WO2003/019624

Priority 60/315,098 27.08.01 US

Filing date 27 August 2002

Wipo publication date 10 March 2003

Event Publications

23 January 2003 Complete Application Filed

  Priority application(s): 60/315,098 27.08.01 US

5 June 2003 Application Open to Public Inspection

  Published as AU-A-2002326783

10 June 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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