IMPROVED CHEMICAL MECHANICAL POLISHING COMPOSITIONS FOR METAL AND ASSOCIATED MATERIALS AND METHOD OF USING SAME

Details for Australian Patent Application No. 2002326636 (hide)

Owner ADVANCED TECHNOLOGY MATERIALS, INC.

Inventors MA, Ying; WOJTCZAK, William; REGULSKI, Cary; BAUM, Thomas, H.; BERNHARD, David; VERMA, Deepak

Pub. Number AU-A-2002326636

PCT Number PCT/US02/25791

PCT Pub. Number WO2003/015981

Priority 09/929,564 14.08.01 US; 09/932,415 17.08.01 US

Filing date 14 August 2002

Wipo publication date 3 March 2003

Event Publications

23 January 2003 Complete Application Filed

  Priority application(s): 09/929,564 14.08.01 US; 09/932,415 17.08.01 US

29 May 2003 Application Open to Public Inspection

  Published as AU-A-2002326636

6 May 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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