SPECTROSCOPIC MEASUREMENT OF THE CHEMICAL CONSTITUENTS OF A CMP SLURRY

Details for Australian Patent Application No. 2002326596 (hide)

Owner PARTICLE MEASURING SYSTEMS, INC.

Inventors CERNI, Todd, A.

Pub. Number AU-A-2002326596

PCT Number PCT/US02/25426

PCT Pub. Number WO2003/016881

Priority 09/928,948 13.08.01 US

Filing date 12 August 2002

Wipo publication date 3 March 2003

International Classifications

G01N 021/31 Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible, or ultra-violet light - Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry

B24B 049/12 Measuring - involving optical means

Event Publications

23 January 2003 Complete Application Filed

  Priority application(s): 09/928,948 13.08.01 US

29 May 2003 Application Open to Public Inspection

  Published as AU-A-2002326596

6 May 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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