SEMICONDUCTOR STRUCTURE IMPLEMENTING SACRIFICIAL MATERIAL AND METHODS FOR MAKING AND IMPLEMENTING THE SAME

Details for Australian Patent Application No. 2002326296 (hide)

Owner LAM RESEARCH CORPORATION GOTKIS, Yehiel WEI, David KISTLER, Rodney

Inventors GOTKIS, Yehiel; KISTLER, Rodney; WEI, David

Pub. Number AU-A-2002326296

PCT Number PCT/US02/09617

PCT Pub. Number WO2002/103791

Priority 09/821,415 28.03.01 US

Filing date 26 March 2002

Wipo publication date 2 January 2003

International Classifications

H01L 021/768 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 023/532 Details of semiconductor or other solid state devices

Event Publications

23 January 2003 Complete Application Filed

  Priority application(s): 09/821,415 28.03.01 US

15 May 2003 Application Open to Public Inspection

  Published as AU-A-2002326296

19 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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