MICROSTRUCTURE WITH MOVABLE MASS

Details for Australian Patent Application No. 2002326167 (hide)

Owner SUMITOMO METAL INDUSTRIES, LTD.

Inventors HASHIMOTO, Hiroyuki; OOASA, Takahiko; IKEUCHI, Naoki; HARADA, Muneo

Pub. Number AU-A-2002326167

PCT Number PCT/JP02/08879

PCT Pub. Number WO2003/023414

Priority 2002-244283 23.08.02 JP; 2001-266604 04.09.01 JP; 2002-244282 23.08.02 JP

Filing date 2 September 2002

Wipo publication date 24 March 2003

International Classifications

G01P 015/12 Measuring acceleration - by alteration of electrical resistance

G01P 015/00 Measuring acceleration

G01P 015/08 Measuring acceleration - with conversion into electric or magnetic values

G01C 019/56 Gyroscopes - Turn-sensitive devices with vibrating masses, e.g. tuning fork

B81C 001/00 Manufacture or treatment of devices or systems in or on a substrate

B81B 003/00 Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes

B81B 007/00 Micro-structural systems

Event Publications

23 January 2003 Complete Application Filed

  Priority application(s): 2002-244283 23.08.02 JP; 2001-266604 04.09.01 JP; 2002-244282 23.08.02 JP

19 June 2003 Application Open to Public Inspection

  Published as AU-A-2002326167

10 June 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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