PLASMA TREATING APPARATUS AND PLASMA TREATING METHOD

Details for Australian Patent Application No. 2002326159 (hide)

Owner MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.

Inventors TERAYAMA, Junichi; ARITA, Kiyoshi; IWAI, Tetsuhiro

Pub. Number AU-A-2002326159

PCT Number PCT/JP02/08379

PCT Pub. Number WO2003/019618

Priority 2001-255700 27.08.01 JP

Filing date 20 August 2002

Wipo publication date 10 March 2003

Event Publications

23 January 2003 Complete Application Filed

  Priority application(s): 2001-255700 27.08.01 JP

5 June 2003 Application Open to Public Inspection

  Published as AU-A-2002326159

10 June 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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