COLLECTOR WITH FASTENING DEVICES FOR FASTENING MIRROR SHELLS

Details for Australian Patent Application No. 2002325359 (hide)

Owner CARL ZEISS SEMICONDUCTOR MANUFACTURING TECHNOLOGIES AG

Inventors EGLE, Wilhelm; WEISS, Markus; HAINZ, Joachim; WIETZORREK, Joachim; WANGLER, Johannes; SINGER, Wolfgang

Pub. Number AU-A-2002325359

PCT Number PCT/EP02/08193

PCT Pub. Number WO2003/014833

Priority 101 38 313.4 10.08.01 DE; PCT/EP01/00608 23.01.02 EP

Filing date 23 July 2002

Wipo publication date 24 February 2003

International Classifications

G03F 007/20 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Exposure

Event Publications

16 January 2003 Complete Application Filed

  Priority application(s): 101 38 313.4 10.08.01 DE; PCT/EP01/00608 23.01.02 EP

19 June 2003 Application Open to Public Inspection

  Published as AU-A-2002325359

6 May 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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