METHOD AND APPARATUS FOR UTILIZING INTEGRATED METROLOGY DATA AS FEED-FORWARD DATA

Details for Australian Patent Application No. 2002324982 (hide)

Owner ADVANCED MICRO DEVICES, INC.

Inventors SONDERMAN, Thomas, J.; PASADYN, Alexander, J.; BODE, Christopher, A.

Pub. Number AU-A-2002324982

PCT Number PCT/US02/29037

PCT Pub. Number WO2003/044851

Priority 09/992,447 16.11.01 US

Filing date 12 September 2002

Wipo publication date 10 June 2003

International Classifications

H01L 021/66 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof - Testing or measuring during manufacture or treatment

Event Publications

16 January 2003 Complete Application Filed

  Priority application(s): 09/992,447 16.11.01 US

21 August 2003 Application Open to Public Inspection

  Published as AU-A-2002324982

5 August 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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