SPIRAL GAS FLOW PLASMA REACTOR

Details for Australian Patent Application No. 2002324920 (hide)

Owner CERAMOPTEC INDUSTRIES, INC.

Inventors WOLFGANG, Neuberger; SOLOMATINE, Alexel

Pub. Number AU-A-2002324920

PCT Number PCT/US02/28565

PCT Pub. Number WO2003/023085

Priority 09/950,337 11.09.01 US

Filing date 6 September 2002

Wipo publication date 24 March 2003

International Classifications

C23C 016/00 Chemical deposition or plating by decomposition

Event Publications

16 January 2003 Complete Application Filed

  Priority application(s): 09/950,337 11.09.01 US

19 June 2003 Application Open to Public Inspection

  Published as AU-A-2002324920

10 June 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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