HIGH REP-RATE LASER WITH IMPROVED ELECTRODES

Details for Australian Patent Application No. 2002324905 (hide)

Owner CYMER, INC.

Inventors WATSON, Tom, A.; MOOSMAN, Bryan; IVASCHENKO, Alex, P.; GILLESPIE, Walter, D; RETTIG, Curtis, L.; MORTON, Richard, G.; DYER, Timothy, S.; STEIGER, Thomas, D.; UJAZDOWSKI, Richard, C.

Pub. Number AU-A-2002324905

PCT Number PCT/US02/28463

PCT Pub. Number WO2003/023910

Priority 09/953,026 13.09.01 US; 10/081,589 21.02.02 US; 10/104,502 22.03.02 US

Filing date 6 September 2002

Wipo publication date 24 March 2003

Event Publications

16 January 2003 Complete Application Filed

  Priority application(s): 09/953,026 13.09.01 US; 10/081,589 21.02.02 US; 10/104,502 22.03.02 US

19 June 2003 Application Open to Public Inspection

  Published as AU-A-2002324905

10 June 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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