SEMICONDUCTOR WAFER POSITIONING SYSTEM AND METHOD

Details for Australian Patent Application No. 2002324875 (hide)

Owner NLINE CORPORATION

Inventors PRICE, John, H.

Pub. Number AU-A-2002324875

PCT Number PCT/US02/28110

PCT Pub. Number WO2003/021281

Priority 09/945,917 04.09.01 US

Filing date 4 September 2002

Wipo publication date 18 March 2003

International Classifications

G01R 031/00 Arrangements for testing electric properties

Event Publications

16 January 2003 Complete Application Filed

  Priority application(s): 09/945,917 04.09.01 US

5 June 2003 Application Open to Public Inspection

  Published as AU-A-2002324875

10 June 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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