A METHOD AND SYSTEM OF LITHOGRAPHY USING MASKS HAVING GRAY-TONE FEATURES

Details for Australian Patent Application No. 2002324868 (hide)

Owner MASSACHUSETTS INSTITUTE OF TECHNOLOGY

Inventors FRITZE, Michael; TYRELL, Brian, M.

Pub. Number AU-A-2002324868

PCT Number PCT/US02/28042

PCT Pub. Number WO2003/079111

Priority 60/361,612 04.03.02 US

Filing date 4 September 2002

Wipo publication date 29 September 2003

International Classifications

G03F 001/14 Preparation of originals for the photomechanical production of textured or patterned surfaces - Originals characterised by structural details, e.g. supports, cover layers, pellicle rings

G03F 007/20 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Exposure

Event Publications

16 January 2003 Complete Application Filed

  Priority application(s): 60/361,612 04.03.02 US

6 November 2003 Application Open to Public Inspection

  Published as AU-A-2002324868

18 November 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

Legal

The information provided by the Site not in the nature of legal or other professional advice. The information provided by the Site is derived from third parties and may contain errors. You must make your own enquiries and seek independent advice from the relevant industry professionals before acting or relying on any information contained herein. Check the above data against the Australian Patent Office AUSPAT database.

Next and Previous Patents/Applications

2002324869-INFUSION DEVICE AND DRIVING MECHANISM FOR SAME

2002324867-SELECTIVE SORBENTS FOR PURIFICATION OF HYDROCARBONS