LASER LITHOGRAPHY LIGHT SOURCE WITH BEAM DELIVERY

Details for Australian Patent Application No. 2002324742 (hide)

Owner CYMER, INC.

Inventors KLENE, Brian, C.; DAS, Palash, P.; GROVE, Steven, L.; ERSHOV, Alexander, I.; SMITH, Scott, T.; PAN, Xiaojiang, J.; SANDSTROM, Richard, L.

Pub. Number AU-A-2002324742

PCT Number PCT/US02/26400

PCT Pub. Number WO2003/021732

Priority 10/141,216 07.05.02 US; 09/943,343 29.08.01 US; 10/000,991 14.11.01 DE; 10/006,913 29.11.01 US; 10/036,727 21.12.01 US; 10/036,676 21.12.01 US

Filing date 19 August 2002

Wipo publication date 18 March 2003

International Classifications

H01S 003/22 Lasers, i.e. devices for generation, amplification, modulation, demodulation, or frequency-changing, using stimulated emission, of infra-red, visible, or ultra-violet waves

Event Publications

16 January 2003 Complete Application Filed

  Priority application(s): 10/141,216 07.05.02 US; 09/943,343 29.08.01 US; 10/000,991 14.11.01 DE; 10/006,913 29.11.01 US; 10/036,727 21.12.01 US; 10/036,676 21.12.01 US

5 June 2003 Application Open to Public Inspection

  Published as AU-A-2002324742

10 June 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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