METHOD AND APPARATUS FOR DOPING SEMICONDUCTORS

Details for Australian Patent Application No. 2002324653 (hide)

Owner EVERGREEN SOLAR, INC.

Inventors CRETELLA, Mary, C.; WALLACE, Richard, L.

Pub. Number AU-A-2002324653

PCT Number PCT/US02/25259

PCT Pub. Number WO2003/015144

Priority 60/311,782 10.08.01 US

Filing date 8 August 2002

Wipo publication date 24 February 2003

International Classifications

H01L 021/22 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/228 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

16 January 2003 Complete Application Filed

  Priority application(s): 60/311,782 10.08.01 US

19 June 2003 Application Open to Public Inspection

  Published as AU-A-2002324653

6 May 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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