DISCHARGE SOURCE WITH GAS CURTAIN FOR PROTECTING OPTICS FROM PARTICLES

Details for Australian Patent Application No. 2002324559 (hide)

Owner EUV LIMITED LIABILITY CORPORATION

Inventors FORNACIARI, Neal, R.; KANOUFF, Michael, P.

Pub. Number AU-A-2002324559

PCT Number PCT/US02/24092

PCT Pub. Number WO2003/026363

Priority 09/956,275 18.09.01 US

Filing date 29 July 2002

Wipo publication date 1 April 2003

International Classifications

H05G 002/00 Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma

G03F 007/20 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Exposure

Event Publications

16 January 2003 Complete Application Filed

  Priority application(s): 09/956,275 18.09.01 US

5 June 2003 Application Open to Public Inspection

  Published as AU-A-2002324559

10 June 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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