METHOD AND SYSTEM FOR MEASURING THE TOPOGRAPHY OF A SAMPLE

Details for Australian Patent Application No. 2002324315 (hide)

Owner NOVA MEASURING INSTRUMENTS LTD.

Inventors SCHEINER, David

Pub. Number AU-A-2002324315

PCT Number PCT/IL02/00657

PCT Pub. Number WO2003/014659

Priority 144805 08.08.01 IL

Filing date 8 August 2002

Wipo publication date 24 February 2003

International Classifications

G01B 011/00 Measuring arrangements characterised by the use of optical means

Event Publications

16 January 2003 Complete Application Filed

  Priority application(s): 144805 08.08.01 IL

19 June 2003 Application Open to Public Inspection

  Published as AU-A-2002324315

6 May 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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