A ZOOM SYSTEM, IN PARTICULAR, A ZOOM SYSTEM FOR AN ILLUMINATION DEVICE OF A MICROLITHOGRAPHIC PROJECTION SYSTEM

Details for Australian Patent Application No. 2002324074 (hide)

Owner CARL ZEISS SEMICONDUCTOR MANUFACTURING TECHNOLOGIES AG

Inventors KOEHLER, Jess

Pub. Number AU-A-2002324074

PCT Number PCT/EP02/09665

PCT Pub. Number WO2003/023521

Priority 101 44 244.0 05.09.01 DE

Filing date 30 August 2002

Wipo publication date 24 March 2003

International Classifications

G03F 007/20 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Exposure

G02B 013/14 Optical objectives specially designed for the purposes specified below - for use with infra-red or ultra-violet radiation

Event Publications

16 January 2003 Complete Application Filed

  Priority application(s): 101 44 244.0 05.09.01 DE

19 June 2003 Application Open to Public Inspection

  Published as AU-A-2002324074

10 June 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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