SEMICONDUCTOR MANUFACTURING APPARATUS CONTROL SYSTEM

Details for Australian Patent Application No. 2002323987 (hide)

Owner ASAHI KASEI MICROSYSTEMS CO.,LTD.

Inventors IMAI, Keiji

Pub. Number AU-A-2002323987

PCT Number PCT/JP02/07798

PCT Pub. Number WO2003/012837

Priority 2001-231969 31.07.01 JP

Filing date 31 July 2002

Wipo publication date 17 February 2003

International Classifications

H01L 021/02 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof -

H01L 021/027 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

G03F 007/20 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Exposure

Event Publications

16 January 2003 Complete Application Filed

  Priority application(s): 2001-231969 31.07.01 JP

29 May 2003 Application Open to Public Inspection

  Published as AU-A-2002323987

6 May 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

Legal

The information provided by the Site not in the nature of legal or other professional advice. The information provided by the Site is derived from third parties and may contain errors. You must make your own enquiries and seek independent advice from the relevant industry professionals before acting or relying on any information contained herein. Check the above data against the Australian Patent Office AUSPAT database.

Next and Previous Patents/Applications

2002323988-PROCESS FOR PRODUCING CELLULOSE ACYLATE FILM

2002323986-COMMODITY INDICATION DATA TRANSMISSION METHOD AND SYSTEM, AND RECEPTION APPARATUS