DRY DEVELOPING METHOD

Details for Australian Patent Application No. 2002323983 (hide)

Owner TOKYO ELECTRON LIMITED

Inventors BALASUBRAMANIAM, Vaidya Nathan; INAZAWA, Koichiro; MISHINO, Masaru; KITAMURA, Akinori

Pub. Number AU-A-2002323983

PCT Number PCT/JP02/08242

PCT Pub. Number WO2003/017343

Priority 2001-249233 20.08.01 JP

Filing date 13 August 2002

Wipo publication date 3 March 2003

International Classifications

H01L 021/027 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

G03F 007/20 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Exposure

Event Publications

16 January 2003 Complete Application Filed

  Priority application(s): 2001-249233 20.08.01 JP

29 May 2003 Application Open to Public Inspection

  Published as AU-A-2002323983

6 May 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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