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Details for Australian Patent Application No. 2002323790 (hide)

Owner TOKYO ELECTRON LIMITED

Inventors NAKANISHI, Toshio; SUGAWARA, Takuya; MATSUYAMA, Seiji; SASAKI, Masaru

Pub. Number AU-A-2002323790

PCT Number PCT/JP02/07927

PCT Pub. Number WO2003/015151

Priority 2001-235627 02.08.01 JP

Filing date 2 August 2002

Wipo publication date 24 February 2003

International Classifications

H01L 021/318 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 029/78 Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having at least one potential-jump barrier or surface barrier

H01L 021/336 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

16 January 2003 Complete Application Filed

  Priority application(s): 2001-235627 02.08.01 JP

19 June 2003 Application Open to Public Inspection

  Published as AU-A-2002323790

6 May 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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