RARE EARTH SALT/OXIDIZER-BASED CMP METHOD

Details for Australian Patent Application No. 2002323662 (hide)

Owner CABOT MICROELECTRONICS CORPORATION

Inventors MOEGGENBORG, Kevin, J.; BRUSIC, Vlasta; CHERIAN, Isaac, K.

Pub. Number AU-A-2002323662

PCT Number PCT/US02/28616

PCT Pub. Number WO2003/027201

Priority 09/961,934 24.09.01 US

Filing date 6 September 2002

Wipo publication date 7 April 2003

International Classifications

C09G 001/02 Polishing compositions

C09K 003/14 Materials not provided for elsewhere - Anti-slip materials

H01L 021/321 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

16 January 2003 Complete Application Filed

  Priority application(s): 09/961,934 24.09.01 US

26 June 2003 Application Open to Public Inspection

  Published as AU-A-2002323662

10 June 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

Legal

The information provided by the Site not in the nature of legal or other professional advice. The information provided by the Site is derived from third parties and may contain errors. You must make your own enquiries and seek independent advice from the relevant industry professionals before acting or relying on any information contained herein. Check the above data against the Australian Patent Office AUSPAT database.

Next and Previous Patents/Applications

2002323663-BIARYL SUBSTITUTED PURINE DERIVATIVES AS POTENT ANTIPROLIFERATIVE AGENTS

2002323661-Biomedical devices containing internal wetting agents