FLAT MAGNETRON

Details for Australian Patent Application No. 2002323633 (hide)

Owner SPUTTERED FILMS, INC.

Inventors CLARKE, Peter, J.

Pub. Number AU-A-2002323633

PCT Number PCT/US02/28403

PCT Pub. Number WO2003/023814

Priority 09/949,181 07.09.01 US

Filing date 6 September 2002

Wipo publication date 24 March 2003

International Classifications

H01J 037/34 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof

C23C 014/35 Coating by vacuum evaporation, by sputtering or by ion implantation - by application of a magnetic field, e.g. magnetron sputtering

Event Publications

16 January 2003 Complete Application Filed

  Priority application(s): 09/949,181 07.09.01 US

19 June 2003 Application Open to Public Inspection

  Published as AU-A-2002323633

10 June 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

Legal

The information provided by the Site not in the nature of legal or other professional advice. The information provided by the Site is derived from third parties and may contain errors. You must make your own enquiries and seek independent advice from the relevant industry professionals before acting or relying on any information contained herein. Check the above data against the Australian Patent Office AUSPAT database.

Next and Previous Patents/Applications

2002323634-FLEXIBLE DELIVERY SYSTEM

2002323632-METHOD FOR PRODUCING A DEVICE FOR DIRECT THERMOELECTRIC ENERGY CONVERSION