DUMMY STRUCTURES TO REDUCE METAL RECESS IN ELECTROPOLISHING PROCESS

Details for Australian Patent Application No. 2002323248 (hide)

Owner ACM RESEARCH, INC.

Inventors WANG, Hui; YIH, Peihaur

Pub. Number AU-A-2002323248

PCT Number PCT/US02/26309

PCT Pub. Number WO2003/019641

Priority 60/314,617 23.08.01 US

Filing date 16 August 2002

Wipo publication date 10 March 2003

International Classifications

H01L 021/311 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 023/52 Details of semiconductor or other solid state devices - Arrangements for conducting electric current within the device in operation from one component to another

Event Publications

16 January 2003 Complete Application Filed

  Priority application(s): 60/314,617 23.08.01 US

5 June 2003 Application Open to Public Inspection

  Published as AU-A-2002323248

6 May 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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