METHOD AND APPARATUS FOR THE ULTRASONIC ACTUATION OF THE CANTILEVER OF A PROBEBASED INSTRUMENT

Details for Australian Patent Application No. 2002323227 (hide)

Owner GEORGIA TECH RESEARCH CORPORATION XEROX CORPORATION

Inventors HADIMIOGLU, Babur, B.; ONARAN, Abidin, Guclu; DEGERTEKIN, Levent, F.

Pub. Number AU-A-2002323227

PCT Number PCT/US02/26215

PCT Pub. Number WO2003/019108

Priority 10/096,367 12.03.02 US; 60/313,911 21.08.01 US

Filing date 19 August 2002

Wipo publication date 10 March 2003

International Classifications

G01B 007/34 Measuring arrangements characterised by the use of electric or magnetic means - for measuring roughness or irregularity of surfaces

Event Publications

16 January 2003 Complete Application Filed

  Priority application(s): 10/096,367 12.03.02 US; 60/313,911 21.08.01 US

5 June 2003 Application Open to Public Inspection

  Published as AU-A-2002323227

6 May 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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